On chip heating for electrical trimming of polysilicon and polysilicon-silicon-germanium resistors and electrically programmable fuses for integrated circuits
US6958523B2 · kind B2 · utility
21Cited by
6References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 7, 2001 |
| Grant date | Oct 25, 2005 |
| Priority date | — |
| Expiry date | Apr 5, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An integrated circuit programmable structure (60) is formed for use a trim resistor and/or a programmable fuse. The programmable structure comprises placing heating elements (70) in close proximity to the programmable structure (60) to heat the programmable structure (60) during programming.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.