Patent · US Expired

Method of improving the properties of adhesion of a non-oxide ceramic substrate before gluing it

US6960278B2 · kind B2 · utility

5Cited by
2References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 5, 2002
Grant dateNov 1, 2005
Priority date
Expiry dateApr 5, 2023

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldMaterials, metallurgy
  • WIPO sectorChemistry

Abstract

A method of improving the properties of adhesion of a non-oxide ceramic substrate before gluing it includes the steps of irradiating the surface of the ceramic substrate using an excimer laser and applying a coupling agent to the irradiated surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.