Reflectometer and method for manufacturing a reflectometer

US6961174B1 · kind B1 · utility

Assignee

• DR. JOHANNES HEIDENHAIN GMBH · DE

Inventors

• Josef Weidmann · Feichten, DE
• Peter Speckbacher · Kirchweidach, DE

Key dates

• Filing date: Jul 15, 2000
• Grant date: Nov 1, 2005
• Expiry date: Oct 13, 2021

Classification

• Technology area (CPC G): Physics
• CPC primary: G01D5/347
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A reflection-type graduation having a silicon substrate. The silicon substrate has first subsections formed thereon. Each of the first subsections has etched oblique surfaces. The surfaces are positioned so that light beams directed incident to the surfaces cause no retroreflection. The substrate also includes second subsections having relatively higher reflecting properties as compared to the first subsections. The first subsections and second subsections are alternatively disposed on the substrate in a first direction.