Design methodology for dummy lines
US6961915B2 · kind B2 · utility
15Cited by
3References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 6, 2002 |
| Grant date | Nov 1, 2005 |
| Priority date | — |
| Expiry date | May 23, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method and system for designing a dummy grid in an open area of a circuit adjacent to at least one metal line comprising the circuits is disclosed. The method and system include patterning dummy lines in the dummy grid adjacent to metal signal lines, and patterning non-floating dummy lines in the dummy grid adjacent to metal power lines. The method and system further include varying sizes and spacing of the dummy lines in the respective columns of the dummy grid based on the distance between each column and the adjacent metal line, to achieve a balance between planarization and performance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.