System and method for a mass flow controller
US6962164B2 · kind B2 · utility
43Cited by
66References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 24, 2002 |
| Grant date | Nov 8, 2005 |
| Priority date | — |
| Expiry date | Jun 29, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/8326
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A system and method for controlling a mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the mass flow controller for operation with a fluid and/or operating conditions different from that used during a production of the mass flow controller. Further, the system and method includes providing control by reducing the effects of hysteresis in solenoid actuated devices by providing a non-operational signal to the solenoid actuated device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.