Substrate conveying module and system made up of substrate conveying module and workstation

US6962471B2 · kind B2 · utility

Assignee

• Leica Microsystems Jena GmbH · DE

Inventors

• Andreas Birkner · Jena, DE
• Knut Hiltawski · Saalfeld, DE
• Karsten Urban · Jena, DE
• Joachim Wienecke · Jena, DE

Key dates

• Filing date: Jun 14, 2001
• Grant date: Nov 8, 2005
• Expiry date: Jun 14, 2021

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67775
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

The invention is based on a substrate conveying module (1) for conveying substrates into a workstation (3) for inspection, measurement, or processing of the substrates, in which on because of connecting elements (4a, b) in at least two side walls (1a, b, c) of the substrate conveying module (1) and/or in at least two side walls (3a, b, c, d) of the workstation (3), the substrate conveying module (1) can, at the installation location of the workstation (3), be flexibly connected thereto in different orientations with respect to the workstation (3) and/or can be coupled at different points to the workstation (3).