Andreas Birkner
12Patents
4h-index
16Co-inventors
57Inventor score
Filing activity: Jul 9, 1982 → May 3, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6962471B2 | Substrate conveying module and system made up of substrate conveying module and workstation | Electricity | 32 | Expired |
| US6736582B1 | Device for manipulating an object for loading and unloading a clean room | Emerging Cross-Sectional Technologies | 27 | Expired |
| US5605428A | Device for indexing magazine compartments and wafer-shaped objects in the compartments | Emerging Cross-Sectional Technologies | 27 | Expired |
| US8089622B2 | Device and method for evaluating defects in the edge area of a wafer and use of the device in inspection system for wafers | Physics | 7 | Active |
| US5636724A | Device for transferring a transport object between two end positions | Emerging Cross-Sectional Technologies | 4 | Expired |
| US7028565B2 | Method and arrangement for transporting and inspecting semiconductor substrates | Electricity | 4 | Expired |
| US4406790A | Method for operating a biological sewage purification plant | Emerging Cross-Sectional Technologies | 3 | Expired |
| US6553850B2 | Method and arrangement for transporting and inspecting semiconductor substrates | Electricity | 1 | Expired |
| US10322919B2 | Maintenance apparatus | Electricity | 1 | Active |
| US6845174B2 | Arrangement and method for the identification of substrates | Physics | 1 | Expired |
| US12063745B2 | Method for processing substrates, in particular wafers, masks or flat panel displays, with a semi-conductor industry machine | Electricity | 0 | Active |
| US6789436B2 | Method and arrangement for transporting and inspecting semiconductor substrates | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.