Voltage applying apparatus, and apparatus and method for manufacturing electron source
US6962516B2 · kind B2 · utility
4Cited by
8References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 9, 2002 |
| Grant date | Nov 8, 2005 |
| Priority date | — |
| Expiry date | Dec 7, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J9/027
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A voltage applying apparatus including a holder, a probe and the like as voltage applying means enabling the application of a voltage to electrode wiring connected with electric conductors formed on a substrate on which the electrode wiring is formed. The apparatus is equipped with aligning means making the position of the probe follow to the changes of the position of the electrode wiring to coincide with them. The aligning means makes the position of the probe follow the position of the electrode wiring so that the probe aligns the electrode wiring by the thermal expansion of the holder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.