Method for the manufacture and transmissive irradiation of a sample, and particle-optical system
US6963068B2 · kind B2 · utility
37Cited by
12References
40Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 15, 2004 |
| Grant date | Nov 8, 2005 |
| Priority date | — |
| Expiry date | Jan 15, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31749
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention provides a method for the manufacture and transmissive irradiation of a sample, comprising the steps of:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.