Patent · US Expired

Method and apparatus for analyzing manufacturing data

US6965895B2 · kind B2 · utility

64Cited by

9References

24Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Shawn B. Smith · Portola Valley, US
Brian P. Grigsby · Austin, US
Hung John Pham · Cedar Park, US
Tony Davis · Austin, US
Manjunath Yedatore · Austin, US
William Clements · Austin, US

Key dates

Filing date	Jul 12, 2002
Grant date	Nov 15, 2005
Priority date	—
Expiry date	Mar 28, 2023

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S707/99945
WIPO fieldComputer technology
WIPO sectorElectrical engineering

Abstract

A method for data mining information obtained in an integrated circuit fabrication factory (“fab”) that includes steps of: (a) gathering data from the fab from one or more of systems, tools, and databases that produce data in the fab or collect data from the fab; (b) formatting the data and storing the formatted data in a source database; (c) extracting portions of the data for use in data mining in accordance with a user specified configuration file; (d) data mining the extracted portions of data in response to a user specified analysis configuration file; (e) storing results of data mining in a results database; and (f) providing access to the results.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.