Coating thickness control using surface features
US6967054B2 · kind B2 · utility
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5Claims
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Key dates
| Filing date | Mar 6, 2003 |
| Grant date | Nov 22, 2005 |
| Priority date | — |
| Expiry date | Jun 20, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24612
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A uniform coating is provided using surface features. Multiple ridges or other shapes are fabricated near an area of interest to allow for uniform coating in between the ridges. Areas at either ends of the ridges are left open to allow for excess pooling of photoresist liquid and to aid in obtaining uniform coating. The photoresist liquid or other coating fluid is applied to the sample and spun dry. A soft-bake process is performed to evaporate remaining solvents. An element, such as a diffractive, refractive, or reflective grating structure, is then formed in the area of interest using the uniform photoresist coating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.