Photo reticles using channel assist features
US6968528B2 · kind B2 · utility
0Cited by
0References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 2, 2003 |
| Grant date | Nov 22, 2005 |
| Priority date | — |
| Expiry date | Nov 5, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/36
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Photo reticles (110) are formed comprising a first and second printable features (130), (140) which are connected by a channel assist feature (150). The size of the channel assist feature is such that the channel assist feature will not substantially print on photoresist that is exposed using the reticle. Third printable features (120) can be placed a distance WD from the channel assist feature (150). The channel assist feature will assist in the formation of the third printable feature (120).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.