Spin-on-glass anti-reflective coatings for photolithography
US6969753B2 · kind B2 · utility
21Cited by
68References
15Claims
0Family size
Assignee
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Key dates
| Filing date | Nov 19, 2002 |
| Grant date | Nov 29, 2005 |
| Priority date | — |
| Expiry date | Nov 19, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31663
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
Anti-reflective coating materials for deep ultraviolet photolithography include one or more organic light-absorbing compounds incorporated into spin-on-glass materials. Suitable absorbing compounds are strongly absorbing over wavelength ranges around wavelengths such as 365 nm, 248 nm, and 193 nm that may be used in photolithography. A method of making absorbing spin-on-glass materials includes combining one or more organic absorbing compounds with alkoxysilane or halosilane reactants during synthesis of the spin-on-glass materials.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.