Inventor · Palo Alto, CA, US

Nigel Hacker

40Patents
14h-index
28Co-inventors
81Inventor score

Filing activity: Feb 17, 1987 → Apr 5, 2007

Most-cited inventions

PatentTitleAreaCited byStatus
US6268457A Spin-on glass anti-reflective coatings for photolithography Emerging Cross-Sectional Technologies 115 Expired
US6365765B1 Spin-on-glass anti-reflective coatings for photolithography Emerging Cross-Sectional Technologies 79 Expired
US6506497B1 Spin-on-glass anti-reflective coatings for photolithography Emerging Cross-Sectional Technologies 59 Expired
US6444495B1 Dielectric films for narrow gap-fill applications Electricity 56 Expired
US6472076B1 Deposition of organosilsesquioxane films Emerging Cross-Sectional Technologies 36 Expired
US4948629A Deposition of diamond films Chemistry; Metallurgy 26 Expired
US6143855A Organohydridosiloxane resins with high organic content Electricity 25 Expired
US6653718B2 Dielectric films for narrow gap-fill applications Electricity 22 Expired
US6824879B2 Spin-on-glass anti-reflective coatings for photolithography Emerging Cross-Sectional Technologies 21 Expired
US6969753B2 Spin-on-glass anti-reflective coatings for photolithography Emerging Cross-Sectional Technologies 21 Expired
US6043330A Synthesis of siloxane resins Electricity 20 Expired
US6956097B2 Spin-on-glass anti-reflective coatings for photolithography Emerging Cross-Sectional Technologies 18 Expired
US6177199A Dielectric films from organohydridosiloxane resins with low organic content Emerging Cross-Sectional Technologies 18 Expired
US7029826B2 Method to restore hydrophobicity in dielectric films and materials Emerging Cross-Sectional Technologies 16 Expired
US7012125B2 Spin-on-glass anti-reflective coatings for photolithography Emerging Cross-Sectional Technologies 14 Expired
US6512071B1 Organohydridosiloxane resins with high organic content Electricity 14 Expired
US4760013A Sulfonium salt photoinitiators Emerging Cross-Sectional Technologies 14 Expired
US6218020A Dielectric films from organohydridosiloxane resins with high organic content Emerging Cross-Sectional Technologies 12 Expired
US5973095A Synthesis of hydrogensilsesquioxane and organohydridosiloxane resins Chemistry; Metallurgy 11 Expired
US6020410A Stable solution of a silsesquioxane or siloxane resin and a silicone solvent Chemistry; Metallurgy 11 Expired
US6218497A Organohydridosiloxane resins with low organic content Chemistry; Metallurgy 10 Expired
US6358559B1 Dielectric films from organohydridosiloxane resins with low organic content Emerging Cross-Sectional Technologies 10 Expired
US6967172B2 Colloidal silica composite films for premetal dielectric applications Electricity 10 Expired
US7678462B2 Spin-on-glass anti-reflective coatings for photolithography Emerging Cross-Sectional Technologies 9 Active
US6440550B1 Deposition of fluorosilsesquioxane films Emerging Cross-Sectional Technologies 9 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.