Confocal 3D inspection system and process
US6970287B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 16, 2002 |
| Grant date | Nov 29, 2005 |
| Priority date | — |
| Expiry date | Aug 23, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/0024
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection device comprises a light source, a pellicle beamsplitter for receiving light from the light source and for redirecting the light, and an aperture array for receiving light from the pellicle beamsplitter. The aperture array is a two dimensional array of pinholes having an x axis and a y axis ninety degrees apart, wherein the distance between pinholes in the x direction is greater than the distance between pinholes in the y direction. The inspection device further comprises an imaging system comprising an object imager including a plurality of lenses, a camera reimager including a plurality of lenses, and a camera for acquiring an image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.