Test handler temperature monitoring system
US6971793B2 · kind B2 · utility
5Cited by
22References
35Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 21, 2003 |
| Grant date | Dec 6, 2005 |
| Priority date | — |
| Expiry date | Mar 21, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/3025
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention provides a temperature monitoring system for a semiconductor test handler. A preparation stage brings a test device to a predetermined temperature for testing at a test platform at said predetermined temperature. At least one radiation sensor, such as a thermopile device, is employed in the test handler for detecting a surface temperature of the test device by measuring radiation emitted from the test device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.