Patent · US Expired

BAW resonator having piezoelectric layers oriented in opposed directions

US6975183B2 · kind B2 · utility

105Cited by

9References

20Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Robert Aigner · Winter Garden, US
Martin Handtmann · Riemerling, DE
Stephan Marksteiner · Putzbrunn, DE
Winfried Nessler · Munich, DE

Key dates

Filing date	Apr 8, 2004
Grant date	Dec 13, 2005
Priority date	—
Expiry date	Apr 8, 2024

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/42
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

A BAW resonator includes a first piezoelectric layer made of a material oriented toward a first direction, and a second piezoelectric layer made of a material oriented toward a second direction which is opposed to the first direction. The first piezoelectric layer and the second piezoelectric layer are acoustically coupled with each other.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.