Method and apparatus for implementing an afterglow emission spectroscopy monitor
US6975393B2 · kind B2 · utility
4Cited by
5References
121Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 11, 2003 |
| Grant date | Dec 13, 2005 |
| Priority date | — |
| Expiry date | Jul 30, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32935
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Afterglow spectroscopy allows observing light emission of gaseous species in absence of direct plasma light. This absence avoids the creation of a background spectrum obscuring weak emission from trace species. The invention describes a flowing afterglow version monitoring in-situ the cleanup of vacuum tools during pump/purge cycles. The invention also describes an intermittent afterglow version suitable for trace gas analysis at atmospheric pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.