Verity Instruments, Inc.
32Patents
19Active
32Granted
47Portfolio score
Filing activity: Nov 8, 1993 → May 11, 2023 · 3 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6991514B1 | Optical closed-loop control system for a CMP apparatus and method of manufacture thereof | Performing Operations; Transporting | 109 | Expired |
| US6052188A | Spectroscopic ellipsometer | Physics | 72 | Expired |
| US7339682B2 | Heterodyne reflectometer for film thickness monitoring and method for implementing | Physics | 43 | Expired |
| US8125633B2 | Calibration of a radiometric optical monitoring system used for fault detection and process monitoring | Physics | 34 | Active |
| US6830939B2 | System and method for determining endpoint in etch processes using partial least squares discriminant analysis in the time domain of optical emission spectra | Electricity | 30 | Expired |
| US5816476A | Dual frequency power supply and transducer | Electricity | 22 | Expired |
| US5364005A | Ultrasonic transducer and mount | Performing Operations; Transporting | 18 | Expired |
| US7049156B2 | System and method for in-situ monitor and control of film thickness and trench depth | Electricity | 15 | Expired |
| US9997325B2 | Electron beam exciter for use in chemical analysis in processing systems | Electricity | 12 | Active |
| US9842726B2 | Method and apparatus for the detection of arc events during the plasma processing of a wafer, surface of substrate | Electricity | 11 | Active |
| US6642063B2 | Apparatus for characterization of microelectronic feature quality | Electricity | 9 | Expired |
| US7589843B2 | Self referencing heterodyne reflectometer and method for implementing | Physics | 5 | Active |
| US5595330A | Power supply | Electricity | 5 | Expired |
| US7545503B2 | Self referencing heterodyne reflectometer and method for implementing | Physics | 4 | Expired |
| US6975393B2 | Method and apparatus for implementing an afterglow emission spectroscopy monitor | Electricity | 4 | Expired |
| US7084979B1 | Non-contact optical profilometer with orthogonal beams | Physics | 4 | Expired |
| US10365212B2 | System and method for calibration of optical signals in semiconductor process systems | Electricity | 3 | Active |
| US9386241B2 | Apparatus and method for enhancing dynamic range of charge coupled device-based spectrograph | Electricity | 3 | Expired |
| US9383323B2 | Workpiece characterization system | Physics | 2 | Active |
| US7630859B2 | Method and apparatus for reducing the effects of window clouding on a viewport window in a reactive environment | Physics | 2 | Active |
| US9310250B1 | High dynamic range measurement system for process monitoring | Physics | 1 | Active |
| US10679832B2 | Microwave plasma source | Electricity | 1 | Active |
| US11885682B2 | System, apparatus, and method for spectral filtering | Electricity | 0 | Active |
| US11424115B2 | Multimode configurable spectrometer | Physics | 0 | Active |
| US10861755B2 | System and method for measurement of complex structures | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.