Methods and systems for simultaneously fabricating multi-frequency MEMS devices
US6978673B2 · kind B2 · utility
37Cited by
20References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 7, 2003 |
| Grant date | Dec 27, 2005 |
| Priority date | — |
| Expiry date | Feb 7, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R33/0286
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for providing micro-electromechanical systems (MEMS) devices with multiple motor frequencies and uniform motor-sense frequency separation is described. The devices each include at least one proof mass, each proof mass being connected to a substrate by a system of suspensions. The method includes controlling the resonant frequencies of the MEMS device by adjusting at least two of a mass of the proof masses, a bending stiffness of the proof masses, a length of the suspensions, and a width of the suspensions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.