Pattern evaluation method, pattern evaluation system and computer-readable recorded medium
US6985626B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 26, 2002 |
| Grant date | Jan 10, 2006 |
| Priority date | — |
| Expiry date | Jun 25, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A pattern evaluation method includes processing image data of at least one pattern serving as an object to be evaluated and detecting coordinates of edge points of the pattern in an image of the image data, making pairs of edge points from the edge points of the pattern, setting an arbitrary axis, calculating a distances between the edge points of each pair of the pairs of edge points and an angle between a straight line connecting the edge points of the pair and the axis, preparing a distance/angle distribution map which represents distribution of the distances and angles of the pairs of edge points, extracting a characteristic point of the distance/angle distribution map and analyzing the pattern on the basis of the extracted characteristic point.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.