System and method of planar positioning
US6986211B2 · kind B2 · utility
5Cited by
11References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 15, 2004 |
| Grant date | Jan 17, 2006 |
| Priority date | — |
| Expiry date | Mar 15, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B21/24
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method of controlling the relationship between two surfaces (such as a primary surface and a reference surface) and correcting any deviation from the desired or ideal relationship generally employ a plurality of actuators and flexural assemblies. The actuators may be driven in unison to translate the primary surface in one-dimension; the actuators may also be driven independently, accommodating fine adjustment in pitch, roll, or both, of the primary surface. Flexural assemblies may be implemented to minimize lateral cross-coupling between the linear actuators.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.