Method of aligning a template with a substrate employing moire patterns
US6986975B2 · kind B2 · utility
34Cited by
113References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 5, 2004 |
| Grant date | Jan 17, 2006 |
| Priority date | — |
| Expiry date | May 21, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24802
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
The present invention includes a method of determining an alignment between a substrate and a template spaced-apart from the substrate and having a distance defined therebetween, the substrate having a first pattern disposed thereon and the template having a second pattern disposed thereon, the method including, sensing the first and the second pattern, with the distance being established such that the first and the second pattern form a desired moiré pattern when the template and the substrate are in a desired spatial relationship.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.