Damped control of a micromechanical device
US6987601B2 · kind B2 · utility
4Cited by
17References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 31, 2003 |
| Grant date | Jan 17, 2006 |
| Priority date | — |
| Expiry date | May 8, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Device and method for a damping function to reduce undesirable mechanical transient responses to control signals. In one aspect of the present invention, the damping function may be used to reduce overshoot and oscillation when a digital micromirror is driven from a landing plate to the flat or neutral position. In another aspect of the present invention, the damping function may be used to reduce transient resonance of a digital micromirror when the micromirror is driven to a landing plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.