Device and method for the examination of samples in a non vacuum environment using a scanning electron microscope
US6989542B2 · kind B2 · utility
13Cited by
45References
10Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | May 6, 2004 |
| Grant date | Jan 24, 2006 |
| Priority date | — |
| Expiry date | May 10, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2807
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A chamber suitable for use with a scanning electron microscope. The chamber comprises at least one aperture sealed with a membrane. The membrane is adapted to withstand a vacuum, and is transparent to electrons and the interior of the chamber is isolated from said vacuum. The chamber is useful for allowing wet samples including living cells to be viewed under an electron microscope.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.