Patent · US Expired

Symmetrical high frequency SCR structure

US6989572B2 · kind B2 · utility

6Cited by
15References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 9, 2003
Grant dateJan 24, 2006
Priority date
Expiry dateJul 21, 2023

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/76224
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

In one embodiment, an SCR device (41) includes a p+ wafer (417), a p− layer (416), an n+ buried layer (413) and an n− layer (414). P− wells (411,421) are formed in the n− layer (414). N+ regions (412,422) and p+ regions (415,425) are formed in the p− wells (411,421). A first ohmic contact (431) couples one n+ regions (422) to one p+ region (425). A second ohmic contact (433) couples another n+ region (412) to another p+ region (415) to provide physically and electrically symmetrical low-voltage p-n-p-n silicon controlled rectifiers. A deep isolation trench (419) surrounding the SCR device (41) and dopant concentration profiles provide a low capacitance SCR design for protecting high frequency integrated circuits from electrostatic discharges.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.