Growth model automated material handling system
US6990721B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 21, 2003 |
| Grant date | Jan 31, 2006 |
| Priority date | — |
| Expiry date | Mar 21, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/53548
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method for installing an automated material handling system in a semiconductor fabrication facility capable of accommodating a predetermined number of fabrication bays. The handling system has a set of elements including material storage, interbay transport, and intrabay transport elements corresponding to the predetermined number of fabrication bays. The method comprises arranging at least some of the material storage, interbay transport and intrabay transport elements into handling system subsets, and installing one or more of the subsets into the fabrication facility. Each subset has at least one or more corresponding ones of the material storage, interbay transport and intrabay transport elements so that when installed each subset forms a transport circuit allowing substantially unrestricted bi-directional travel of semiconductor device holders between the material storage and at least one of the fabrication bays. The installation of one or more of the subsets into the fabrication facility is accomplished before installation of any element other of the handling system subsets.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.