Multi-level conductive lines with reduced pitch
US6992394B2 · kind B2 · utility
156Cited by
8References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 26, 2001 |
| Grant date | Jan 31, 2006 |
| Priority date | — |
| Expiry date | May 21, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The invention describes the use of conductive lines having a non-rectangular shaped cross section to reduce line capacitance for a given pitch. Such conductive lines can reduce the height of integrated circuits with multi-level conductive lines without increasing line-to-line capacitance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.