Shielded probe apparatus for probing semiconductor wafer
US6992495B2 · kind B2 · utility
11Cited by
29References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 27, 2003 |
| Grant date | Jan 31, 2006 |
| Priority date | — |
| Expiry date | Dec 23, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/18
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A shielded probe apparatus is provided with a shielded probe and a tri-axial cable that are electrically connected within a shielded chassis. The shielded probe apparatus is capable of electrically testing a semiconductor device at a sub 100 fA operating current and an operating temperature up to 300 C.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.