High fill ratio reflective spatial light modulator with hidden hinge
US6992810B2 · kind B2 · utility
37Cited by
49References
35Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 18, 2004 |
| Grant date | Jan 31, 2006 |
| Priority date | — |
| Expiry date | May 18, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro mirror array having a hidden hinge that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a hinge, a mirror plate and a reflective surface on the upper surface of the mirror plate, the reflective surface concealing the hinge and the mirror plate. The micro mirror array fabricated from a single material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.