Clamping element with an integrated force sensor
US6993986B2 · kind B2 · utility
0Cited by
4References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 24, 2003 |
| Grant date | Feb 7, 2006 |
| Priority date | — |
| Expiry date | Jan 2, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T24/44291
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A clamping element for the transport of a substrate in a predefined transport direction comprises a first and a second leg with a first and second clamping jaw for clamping a substrate. Each of the two clamping jaws has a clamping plate which is movable in transport direction relative to the corresponding leg. A sensor measures the deflection of the first clamping plate relative to the first leg. As soon as the measured deflection exceeds a predefined threshold value, the clamping element is opened.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.