Control system for a sputtering system
US6995545B2 · kind B2 · utility
26Cited by
64References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 18, 2003 |
| Grant date | Feb 7, 2006 |
| Priority date | — |
| Expiry date | Jan 14, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67253
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A fault handling algorithm processes a plurality of fault status signals from a sputtering system in a period of time to generate at least one command signal for affecting the operation of a power generator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.