Laser beam processing machine
US6998571B2 · kind B2 · utility
124Cited by
4References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 20, 2004 |
| Grant date | Feb 14, 2006 |
| Priority date | — |
| Expiry date | Oct 2, 2024 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K2103/50
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A laser beam processing machine comprising a chuck table for holding a workpiece and a laser beam application means for applying a laser beam to the workpiece held on the chuck table, wherein the machine further comprises a protective film forming means for forming a protective film on the to-be-processed surface of the workpiece before laser beam processing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.