Method of and an apparatus for measuring a specimen by means of a scanning probe microscope
US6998602B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 24, 2002 |
| Grant date | Feb 14, 2006 |
| Priority date | — |
| Expiry date | Sep 24, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/868
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a method of and an apparatus for measuring a specimen by means of a scanning probe microscope, especially a scanning force microscope, wherein a probe (5) is displaced with respect to a specimen (6) by means of lateral and vertical shifting units (1) to measure the specimen (6); measuring light rays (21) are generated by means of a light source (20) and directed to a reflection means (91) disposed on the probe; the measuring light rays (21) are reflected at the reflection means (91), whereby reflected measuring light rays (21a) are formed; and the reflected measuring light rays (21a) are directed by means of a correction lens (47) to a detector surface (32) of a detector means (27) to generate a measurement signal, the correction lens (47) being positioned at a distance from the detector surface (32) substantially corresponding to a focal length of the correction lens (47).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.