Method for evaluating piezoelectric fields
US6998615B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 2, 2004 |
| Grant date | Feb 14, 2006 |
| Priority date | — |
| Expiry date | Feb 27, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/35
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a method of evaluating a piezoelectric field, non-destructive spectrometry of piezoelectric fields is performed in a semiconductor heterojunction using a technique different from PR spectroscopy. In the method, at first, first and second absorption spectra are measured by irradiating the sample with infrared light at first and second angles, respectively. Then, a peak position of an absorption band having incident-angle dependent intensity is specified, based on the first and second absorption spectra. Thus, the piezoelectric field strength is obtained using a relationship between the piezoelectric field and an electron energy level corresponding to the peak position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.