Plain surface stage apparatus
US6998738B2 · kind B2 · utility
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5References
4Claims
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Assignee
Inventor
Key dates
| Filing date | Oct 17, 2003 |
| Grant date | Feb 14, 2006 |
| Priority date | — |
| Expiry date | Apr 15, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70716
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A plain surface stage apparatus includes a platen having a plain surface, stationary type supports comprising at least three supporting members, and displacement type supports, each of which supports the platen and forms a displacement type supporting point at a position other than those of supporting points formed by the stationary type supports, wherein the displacement type supports expand and contract in a direction perpendicular to the plain surface of the platen so as to be displaced, and holds a selected displaced state of the displacement type supports.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.