Micromirror having reduced space between hinge and mirror plate of the micromirror
US7002726B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 11, 2005 |
| Grant date | Feb 21, 2006 |
| Priority date | — |
| Expiry date | Feb 2, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A spatial light modulator is disclosed, along with a method for making such a modulator that comprises an array of micromirror devices. The center-to-center distance and the gap between adjacent micromirror devices are determined corresponding to the light source being used so as to optimize optical efficiency and performance quality. The micromirror device comprises a hinge support formed on a substrate and a hinge that is held by the hinge support. A mirror plate is connected to the hinge via a contact, and the distance between the mirror plate and the hinge is determined according to desired maximum rotation angle of the mirror plate, the optimum gap and pitch between the adjacent micromirrors. In a method of fabricating such spatial light modulator, one sacrificial layer is deposited on a substrate followed by forming the mirror plates, and another sacrificial layer is deposited on the mirror plates followed by forming the hinge supports. The two sacrificial layers are removed via the small gap between adjacent mirror devices with spontaneous vapor phase chemical etchant. Also disclosed is a projection system that comprises such a spatial light modulator, as well as a light sou…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.