Wafer carrier wear indicator
US7008310B2 · kind B2 · utility
11Cited by
12References
25Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 1, 2002 |
| Grant date | Mar 7, 2006 |
| Priority date | — |
| Expiry date | Sep 7, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B41/067
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A wafer carrier for use in polishing disks. The wafer carrier includes a main body and an integral visual inspection wear indicator. The main body has at least one opening formed therein adapted to receive a disk. The visual inspection wear indicator provides a visual indication of when the main body has reached the end of its useful life. The inspection wear indicator may have several portions to incrementally identify the approximate wear stage, that is, the approximate remaining useful life.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.