Lift-out probe having an extension tip, methods of making and using, and analytical instruments employing same
US7009188B2 · kind B2 · utility
98Cited by
11References
38Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 4, 2004 |
| Grant date | Mar 7, 2006 |
| Priority date | — |
| Expiry date | May 4, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31745
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Extension tips for lift-out probes used in conjunction with focused ion beam (FIB) systems and analytical instruments employing such probes are disclosed. Methods of forming the extension tips from a variety of materials such as a silicon wafer, preformed whiskers of conductive material, and metal lines or contacts removed from integrated circuits are also disclosed. Methods of using a variety of extension tips pre-placed within the FIB system to enable reconditioning worn or damaged lift-out probes are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.