Wafer probe station having environment control enclosure
US7009383B2 · kind B2 · utility
96Cited by
31References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 25, 2004 |
| Grant date | Mar 7, 2006 |
| Priority date | — |
| Expiry date | Aug 25, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2887
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.