Inhibition of titanium corrosion
US7012051B2 · kind B2 · utility
6Cited by
25References
42Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 12, 2001 |
| Grant date | Mar 14, 2006 |
| Priority date | — |
| Expiry date | Mar 7, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/31138
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A composition for removing resist, polymeric material and/or etching residue from a substrate comprising titanium or an alloy thereof, the composition comprising hydroxylamine or a derivative thereof and at least one compound having the general formula (I) wherein: R1 and R3 are each independently selected from H, OH, CO2H, halogen, C1–C3 alkyl, C1–C3 alkoxy or (CH2)nOH wherein n is 1, 2 or 3; and R2 is selected from C9–C16 alkyl, or C9–C16 alkoxy
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.