Apparatus for tilting a carrier for optical elements

US7014328B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Ulrich Weber · Ulm, DE
• Hubert Holderer · Oberkochen, DE
• Alexander Kohl · Aalen, DE

Key dates

• Filing date: Apr 8, 2002
• Grant date: Mar 21, 2006
• Expiry date: Apr 28, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B7/182
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The invention relates to an apparatus for tilting a carrier for optical elements with two optical faces which are arranged together on a carrier and are fixed at a fixed angle to one another, the carrier being fastened on a base plate via articulated connections. The carrier can be pivoted about three tilting axes, a first tilting axis preferably being located in the plane of the first optical face and extending normal to the plane of the second optical face, the second tilting axis preferably being located in the plane of the second optical face and extending normal to the plane of the first optical face, and the third tilting axis being located parallel to the line of intersection between the two planes of the optical element.