Purged heater-susceptor for an ALD/CVD reactor
US7015426B2 · kind B2 · utility
3Cited by
3References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 11, 2004 |
| Grant date | Mar 21, 2006 |
| Priority date | — |
| Expiry date | Feb 13, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B3/10
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A heater assembly for an ALD or CVD reactor provides protection for an electrical conductor associated with a heating element by using a purge gas to isolate the conductor from the corrosive environment of the reactor chamber. The purge gas is introduced into a sleeve surrounding the conductor and from there is allowed to leak into the reactor chamber to be pumped out with the process gasses. This arrangement avoids the need for airtight seals at the junction of the sleeve and the heating element easing manufacturing requirements and potentially reducing component costs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.