Miniaturized pressure sensor

US7017420B2 · kind B2 · utility

Assignees

• SILEX MICROSYSTEMS AB · SE
• Patrik Melvas · SE
• Göran Stemme · SE

Inventors

• Edvard Kalvesten · Stuvsta-Snättringe, SE
• Patrik Melv{dot over (a)}s · Stuvsta-Snättringe, SE
• Göran Stemme · Stockholm, SE

Key dates

• Filing date: Jun 7, 2002
• Grant date: Mar 28, 2006
• Expiry date: Aug 30, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L9/0083
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An entirely surface micromachined free hanging strain-gauge pressure sensor is disclosed. The sensing element consists of a 80 μm long H-shaped double ended supported force transducing beam (16). The beam is located beneath and at one end attached to a square polysilicon diaphragm (14) and at the other end to the cavity edge. The sensor according to the invention enables a combination of high pressure sensitivity and miniature chip size as well as good environmental isolation. The pressure sensitivity for the sensor with a H-shaped force transducing beam, 0.4 μm thick was found to be 5 μV/V/mmHg.