Patent assignee · SE · COMPANY

SILEX MICROSYSTEMS AB

32Patents
26Active
32Granted
49Portfolio score

Filing activity: Jun 7, 2002 → Feb 10, 2016 · 5 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US7017420B2 Miniaturized pressure sensor Physics 25 Expired
US6973835B2 Pressure sensor Emerging Cross-Sectional Technologies 18 Expired
US7560802B2 Electrical connections in substrates Electricity 16 Expired
US7207227B2 Pressure sensor Emerging Cross-Sectional Technologies 16 Expired
US7172911B2 Deflectable microstructure and method of manufacturing the same through bonding of wafers Performing Operations; Transporting 13 Expired
US8308960B2 Methods for making micro needles and applications thereof Electricity 11 Active
US8637351B2 Methods for making micro needles and applications thereof Electricity 10 Active
US8485416B2 Bonding process and bonded structures Electricity 6 Active
US9240373B2 Semiconductor devices with close-packed via structures having in-plane routing and method of making same Electricity 6 Active
US9362139B2 Method of making a semiconductor device having a functional capping Electricity 5 Active
US9224681B2 CTE matched interposer and method of making Electricity 4 Active
US9484293B2 Semiconductor devices with close-packed via structures having in-plane routing and method of making same Electricity 3 Active
US9514985B2 Electroless metal through silicon via Electricity 3 Active
US9355895B2 Method of providing a via hole and routing structure Electricity 2 Active
US9718674B2 Thin capping for MEMS devices Electricity 2 Active
US8324103B2 Vias and method of making Electricity 2 Active
US9620390B2 Method of making a semiconductor device having a functional capping Electricity 1 Active
US8592981B2 Via structure and method thereof Electricity 1 Active
US9607915B2 Through substrate vias and device Electricity 1 Active
US9249009B2 Starting substrate for semiconductor engineering having substrate-through connections and a method for making same Electricity 0 Active
US9507142B2 Precise definition of transducer electrodes Electricity 0 Active
US8866289B2 Bonding process and bonded structures Electricity 0 Active
US8729713B2 Via structure and method thereof Performing Operations; Transporting 0 Active
US8598676B2 Barrier structure Electricity 0 Active
US9511999B2 Thin film capping Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.