Hexakis(monohydrocarbylamino) disilanes and method for the preparation thereof

US7019159B2 · kind B2 · utility

Assignee

• L'Air Liquide, Société Anonyme à Directoire et Conseil de Surveillance pour l'Étude et l'Exploitation des Procédés Georges Claude · FR

Inventors

• Christian Dussarrat · Tokyo, JP
• Jean-Marc Girard · Versailles, FR

Key dates

• Filing date: Nov 27, 2002
• Grant date: Mar 28, 2006
• Expiry date: Nov 27, 2022

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C07F7/10
• WIPO field: Organic fine chemistry
• WIPO sector: Chemistry

Abstract

A composition and method of preparation, to provide silane compounds that are free of chlorine. The compounds are hexakis(monohydrocarbylamino)disilanes with general formula (I)((R)HN)3—Si—Si—(NH(R))3  (I)wherein each R independently represents a C1 to C4 hydrocarbyl. These disilanes may be synthesized by reacting hexachlorodisilane in organic solvent with at least 6-fold moles of the monohydrocarbylamine RNH2 (wherein R is a C1 to C4 hydrocarbyl). Such compounds have excellent film-forming characteristics at low temperatures. These films, particularly in the case of silicon nitride and silicon oxynitride, also have excellent handling characteristics.