Thickness estimation using conductively related calibration samples
US7019519B2 · kind B2 · utility
Inventor
Key dates
| Filing date | Aug 24, 2004 |
| Grant date | Mar 28, 2006 |
| Priority date | — |
| Expiry date | Aug 24, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B7/105
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for monitoring an inspection sample includes generating inspection data comprising resistance and reactance measurements that are obtained from an inspection sample having a conductive layer of unknown thickness. Calibration data is used for estimating the thickness of the conductive layer of the inspection sample. This calibration data includes resistance and reactance measurements obtained from one or more calibration samples, each calibration sample having a conductive layer of known thickness. The conductive layers of the inspection sample and the calibration samples comprise different materials having a known conductive relationship.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.