Inspection microscope and objective for an inspection microscope
US7019910B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 4, 2002 |
| Grant date | Mar 28, 2006 |
| Priority date | — |
| Expiry date | Apr 4, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/0016
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An inspection microscope (1) having a light source (3) that emits light of a first wavelength below 400 nm for illumination of a specimen (13) to be inspected, and having an objective (11) that is composed of multiple optical components and has a numerical aperture and a focal length, and having a tube optical system (21) and an autofocus device (25) that directs light of a second wavelength onto the specimen (13), is disclosed. The inspection microscope (1) is characterized by the objective (11), which has an optical correction that eliminates the longitudinal chromatic aberrations with respect to the first and the second wavelength and whose optical components are assembled in cement-free fashion, the second wavelength being greater than 400 nm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.