Optical waveguide structure and method for fabricating the same
US7020374B2 · kind B2 · utility
32Cited by
507References
17Claims
0Family size
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Key dates
| Filing date | Feb 3, 2003 |
| Grant date | Mar 28, 2006 |
| Priority date | — |
| Expiry date | Apr 25, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/132
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical waveguide structure (10) is provided. The optical waveguide structure (10) has a monocrystalline substrate (12), an amorphous interface layer (14) overlying the monocrystalline substrate (12) and an accommodating buffer layer (16) overlying the amorphous interface layer (14). An optical waveguide layer (20) overlies the accommodating buffer layer (16).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.