Fabrication of a reflective spatial light modulator
US7022245B2 · kind B2 · utility
11Cited by
40References
11Claims
0Family size
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Key dates
| Filing date | Jan 13, 2004 |
| Grant date | Apr 4, 2006 |
| Priority date | — |
| Expiry date | Jan 13, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Fabrication of a reflective spatial light modulator including a micro-mirror array. In one embodiment, the micro mirror array is fabricated from a substrate that is a single crystal material by only two main etching steps. A first etch forms cavities in a first side of the material. A second etch forms support posts, a vertical hinge, and a mirror plate. Between the first and second etches, the substrate can be bonded to addressing and control circuitry.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.